A scroll vacuum pump (also called spiral compressor, scroll pump and scroll compressor) is a device for compressing air or refrigerant. It is used in air conditioning equipment, as an automobile supercharger (where it is known as a scroll-type supercharger) and as a vacuum pump. A scroll compressor uses two interleaving scrolls to pump, compress or pressurize fluids such as liquids and gases. The vane geometry may be involute, archimedean spiral, or hybrid curves.

Varian Scroll Pumps

  • 300DS
  • 600DS
  • PTS300
  • PTS600
  • SH100

Edwards Scroll Pumps

  • ESDP12
  • ESDP30
  • XDS5
  • XDS10
  • XDS35