J & B
MD Pnumatics
Precision Scientific (GCA)
Sargent Welch
Seiko Seiki
Roots Dresser

NOTE: Every pump shipped for service to us must include the completed Declaration of Contamination available here.

We keep a history on every pump received throughout its lifespan. Estimates are given prior to evaluation. A true quote is then issued upon inspection.  All parts meet or exceed OEM specifications. Unless otherwise specified, all repairs come with a certified Can-Vac Technologies 12-month Warranty which starts from the date of installation.

Repair/Rebuild Procedures


Cryo Pumps/Compressor Repair Process

  1. Incoming Inspection:
    Factory-trained technicians disassemble the Cryo pump with OEM tooling, and measure parts to Can-Vac Technologies specific tolerances. Special attention is given to the motor shaft, drive unit and vessel side.
  2. Decontamination:
    Custom Roto-Jet sprays, plastic media blasts, and vapour degreasers remove process from parts.
  3. Failure Analysis:
    Digital pictures of parts and technician observations are entered into the repairs database for review and reporting.
  4. Assembly:
    Replace Indium gasket kit, condensing arrays, radiation shield, all elastomers, and all components subject to wear – including bushings, bearings, displacer and Kap seals. Repair or replace if needed: Silicon Diode and Hydrogen Vapor bulb temperature indicator, Scotch yoke, valves, valve stems, rocker arms, crankshaft, motor shaft, etc.): Electric drive motors, displacer regenerators. Set valve timing and test inlet valve for fit. Decontaminate and recharge cold head with helium.
  5. Final Inspection and Test:
    Leak check via helium mass spectrometer and sniffer probe. Perform “cool-down” test to verify conformance to OEM specs. 36-hour burn-in test to ensure performance.

Cryo Pumps Serviced:

  • CTI

Diffusion Pump Rebuild Procedure

  1. Initial disassembly and inspection for customer quotation
  2. Thorough inspection procedures include testing all heaters, electrical components, jets, baffles, cooling coils, and flanges
  3. Extensive, diversified cleaning and degreasing processes
  4. Replacement of elastomeric materials (seals, gaskets, and o-rings) and heater insulation
  5. Upon final assembly, proper jet alignment is tested and pump housings are stripped and painted
  6. Serviced diffusion pump is matched to a backing pump for final performance and acceptance testing

Diffusion Pumps Serviced:

  • Adixen (Alcatel)
  • CVC
  • Edwards
  • Leybold
  • Varian
  • Other leading
  • manufacturers

Dry Pump Rebuild Procedure

  1. Disassembly:
    Dry Pumps undergo a complete teardown, written evaluation and documentation. Parts are evaluated then brought to original OEM specifications. The pump, frame, flanges, electrical, exhaust, and N2 fittings/lines are all disassembled and cleaned. Additional parts are micrometer measured for critical clearances. Pumps sent in for evaluation, and other special pumps are digitally photographed.
  2. Cleaning:
    After solids removal, parts are first cleaned with a proprietary solution, then dried, blasted with plastic media to prevent metal removal, and placed in a Zero Emission Vapor Degreaser to remove any non-visible contaminants.
  3. Inspection:
    All critical parts are inspected. Parts requiring surface grinding are machined internally. Sleeves and Claws are re-coated (Teflon coating is optional). Scored or slightly grooved shafts are replaced with hard chrome shafts.
  4. Electrical:
    Each motor is inspected for bearing condition and noise level then tested: amp for each phase, armature, and simulated load. Motors are repaired upon request. Electronics are checked, latest software uploaded, and clock reset to zero (because it is as good as new).
  5. Assembly:
    Using factory-trained technicians, each pump is reassembled, clearances are measured and documented, and internal parts are lubricated with the proper oil. All pumps are tested to AVS standards.
  6. Paint:
    Pumps are painted with OEM standard colors. Customer s can request special colors to indicate corrosive / non-corrosive, Fomblin,
  7. Report:
    A complete Service Report is produced and saved electronically prior to shipment. Pumps are palletized and shipped utilizing a dust barrier wrap.

Dry Pumps Serviced:

  • Adixen Alcatel
  • Ebara
  • Edwards
  • Iwata
  • Leybold
  • Stokes
  • Varian

ION PUMP Repair Process

  1. Contamination
    Prior to the return of any ion pump, a contamination form is required. This form is precautionary against ion pumps that are potentially exposed to hazardous chemicals.
  2. Initial Inspection
    The initial inspection of an ion pump consists of observing and documenting
    wear of: 

    • Mounting hardware Magnets
    • Pole Pieces Flanges
    • Feedthroughs Welds (heat stress)

    As these parts are inspected, they are removed from the stainless steel body
    of the ion pump. Replacement parts are issued from new stock as required.
    Major damage will constitute notification of the customer.

  3. Internal Inspection
    Internal inspection reveals the wear on the pumping elements of the ion pump. Depending on their condition, the elements can either be rebuilt or replaced. If the recommendation of Can-Vac is different from the initial assessment quotation, the customer will be notified of the revised recommendation.
  4. UHV Cleaning
    The cleaning process is by far the most important aspect of any UHV system. Ion pumps produced by Gamma Vacuum are subjected to an extensive descaling, chemical etching, and electrical polishing process. Ion pumps that have already received this process require much less effort to clean after they have been subjected to the sputter deposits created in an ion pumps. Regardless of original manufacturer particulate matter is not introduced into the ion pump body. Ion pumps that have been bead blasted by the original manufacturer will be re-cleaned using a combination of etching and polishing to achieve UHV surface standards.
  5. Primary Leak Check
    Once clean, the ion pump is ready for a primary leak check to 1 x 10-10 STD CC/Sec He or better. This process ensures that the pump is free from minor heat stress cracking or other gas sources.
  6. Clean Assembly
    After the body of the ion pump has been cleaned to UHV standards, it will be placed in a class 10,000 clean room environment. The assembly process reinstalls the elements (new or rebuilt) and high voltage feedthrough (new or original).
  7. UHV Processing
    After all UHV cleaned components are installed, the ion pump is sealed and routed for UHV processing with our production ion pumps. 

    1. Initial 12-hour, 250 C bake into separate system
    2. Cool down, start-up
    3. Achieve steady pumping
    4. Isolation of Ion Pump
    5. Second 12-hour, 250 C bake into ion pump
    6. Cool down, achieve steady state of <1 uA
    7. Final magnetic and pole piece assembly
  8. Packaging and Shipment
    The ion pump will then be packaged suitable for heavy shipments. Dimensions allow for ample room around the ion pump to insure no damage.

Ion Pumps and Controllers Serviced:

  • Gamma Vacuum
  • KJLC
  • Leybold
  • Perkin Elmer
  • Phi
  • Physical
  • Electronics
  • Varian
  • And other leading manufacturers

Mechanical Vane Pump/Blower Rebuilding Procedures

NOTE: Please fill out our declaration of vacuum-equipment contamination.

  1. When the equipment is received at Can-Vac Technologies it is tagged. Information such as customers name, manufacturer, model number, serial number of the pump, the voltage the pump is wired at and accessories the pump came with are recorded on the tag.
  2. The equipment is then disassembled taking the necessary precautions for contamination and health hazards. Please fill out our declaration of vacuum-equipment contamination.
  3. The pump is given a preliminary cleaning. The reason for preliminary cleaning is to get rid of contamination and to also be able to give proper analysis of the pump and determine what parts are defective and need to be replaced.
  4. The pump is then analyzed for cause of failure, and recorded. This step is useful to the customer in lowering repair costs and downtime to a minimum. It shows if the pump is not being properly maintained or if the wrong pump is being used in a particular process.
  5. All parts are inspected for wear, defects, and life expectancy using the necessary measuring instruments to check against tolerances specified by the original manufacturer.
  6. The customer is contacted and given the cost of repair and a delivery date of the equipment. No equipment is repaired without the approval of the customer.
  7. Cleaning for assembly: The pump is thoroughly cleaned physically and with chemicals to rid the parts of contamination and deposits which build up in the pump during use.
  8. The equipment is ready for assembly: During the assembly process all major components are lubricated with the recommended oil to ensure there is no metal to metal contact which could cause premature wear of parts and shorten the life expectancy of the equipment. All orings, bushings, seals, valves, springs, vanes, pins, gaskets and wearable parts are replaced.
  9. The equipment is filled with recommended oil to proper levels and ran for 48 hours. During the 48 hours it is checked for gas ballast pressure, total pressure, oil leaks, noise level and temperature specified by the original manufacturer.
  10. The equipment is drained of fluid (dry pumps excluded), cleaned externally and painted with the original color or color specified by the customer. Finally the pump is shipped to the customer with all the accessories it came with.

Mechanical Pumps Serviced:

  • Adixen™ (Alcatel®)
  • Busch
  • Cenco
  • Edwards
  • Galileo
  • Kinney-Tuthill
  • Labconco
  • Leybold
  • Precision Scientific
  • Stokes
  • Welch®
  • ULVAC®
  • VRC
  • Varian
  • And other leading manufacturers

Scroll Pump Repair Procedure

  1. Initial disassembly, decontamination, cleaning, and inspection for customer quotation
  2. Standard repairs include replacement of tip seals and elastomeric materials (seals, bearings, gaskets, and o-rings)
  3. Major repairs include replacement of springs, bearings, bushings, and filters
  4. Final performance and acceptance testing of serviced pump to OEM specifications

Scroll pumps serviced:

  • Anest-Iwata
  • BOC Edwards
  • Busch
  • Hitachi
  • Ilmvac
  • Leybold
  • Mitsubishi
  • Varian
  • And other leading manufacturers

Turbomolecular and Ion Controller/Frequency Converter Repairs

Turbomolecular and Ion pump controller repair costs range in price.  In the process of repair, we also confirm all of the components and replace as needed. These are usually low cost items (most of price is for labour). A full report is then submitted back to you. These reports will have between 12 and 24 tests or checks made (depends on make and model). Many of the original capacitors, resistors, etc have a 30,000 hour average life. Most of the replacement components we use in rebuilds have an average life of 50,000 hours. We do not require your pump in the rebuild of the controller. Typical turn around is 12-15 days. Note: Warranty is six months.

If you do wish to send to us, please contact us for a return reference number. When packaging the controller for transportation to Can-Vac, please be sure to place the controller in a sealed plastic bag or wrap well to prevent any packing material or particulates from getting in or on the controller. If your controller is multi-voltage, please indicate your operating voltage. If you use any of the inter-locks or jumpering typically found on the rear of the controller, please also let us know.

TURBO PUMP Repair Process

If the pump does not use felt or wick then the oil should be drained prior to shipping.

  1. Disassembly
    1. A preliminary visual inspection of the pump is done.
    2. Pump is completely disassembled.
  2. Cleaning
    1. The stator and blades are thoroughly and individually cleaned.
    2. The inside of the housing and other components are cleaned.
    3. After a hand cleaning pumps are then sent to sit in the ultrasonic bath to rid the parts of any oils or minute particles that would affect vacuum pressure.
    4. After cleaning the components are air dried with low pressure compressed air and oven dried to ensure no residue is left on the pump.
  3. Inspection
    1. Parts are inspected for wear.
    2. Inspection worksheet is filled out.
    3. Tolerances are checked.
  4. Assembly
    1. Consumables (O-rings, vibration rings, seals, etc) are replaced.
    2. Bearings are replaced with ABEC 7 rated bearings or better.
  5. Balancing
    1. Pumps are balanced to 0.01 microns. (Generally pumps can tolerate 0.02 microns.)
  6. Testing
    1. Pump is filled with appropriate oil if applicable. (Some bearings are grease loaded and some require oil.)
    2. Run for 72 hours.
    3. Pumps are tested “dead headed” on the testing bench and are tested under load. If you have specific requirements let us know.
    4. Vacuum pressure, temperature, and AMPS are monitored.

Turbo pumps serviced:

  • Alcatel Adixen
  • Balzer
  • BOC Edwards
  • BOC Seiko Seiki
  • KYKY
  • Oerlikon Leybold
  • Osaka
  • Pfeiffer
  • Sciex
  • Varian
  • Shimadzu
  • Welch
  • Other leading manufacturers